Quantitative measurements of sp3 content in DLC films with Raman spectroscopy

• Published in: Surface & coatings technology Vol. 205; no. 7; pp. 1995 - 1999
• Main Authors: Cui, W.G., Lai, Q.B., Zhang, L., Wang, F.M.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 25.12.2010; Elsevier
• Subjects: Coatings; Correlation; Correlation analysis; Cross-disciplinary physics: materials science; rheology; Diamond-like carbon; Diamond-like carbon films; Dispersions; DLC; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Raman spectra; Raman spectroscopy; sp3 content; Surface treatments; Raman spectra; Diamond-like carbon; DLC; sp3 content; Thin films; Synthetic diamond; Surface treatments; Raman spectroscopy; Diamond structure; Carbon; sp; content
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2010.08.093

Hydrogenated and H-free diamond-like carbon (DLC) samples were prepared and 244nm and 514nm Raman spectra were collected and analyzed. Correlations between Raman spectra and sp3 content of DLC samples from this and previous studies have been analyzed. The dispersion rate of the G peak is shown to correlate linearly with the sp3 content of hydrogenated DLC samples, while the full-width-half-maximum of the G peak is shown to correlate nonlinearly with the sp3 content of H-free DLC samples. Quantitative relations are presented for measuring the sp3 content of both hydrogenated and H-free DLC.