Study on photothermal vibration response of gold coating semiconducting microcantilevers
The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and an...
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Published in | International journal of applied electromagnetics and mechanics Vol. 59; no. 2; pp. 391 - 397 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
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IOS Press BV
01.01.2019
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Abstract | The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and analyzed for a set of microcantilevers with different coating thickness at the region near the first resonant frequency. Also the vibrations of microcantilevers were calculated using coupled carrier dispersion, thermal wave and elastic wave equations. The results showed that the experimental results had a good agreement with the theoretical ones. |
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AbstractList | The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and analyzed for a set of microcantilevers with different coating thickness at the region near the first resonant frequency. Also the vibrations of microcantilevers were calculated using coupled carrier dispersion, thermal wave and elastic wave equations. The results showed that the experimental results had a good agreement with the theoretical ones. |
Author | Yang, Xiaogang Song, Yaqin Dong, Tianbao |
Author_xml | – sequence: 1 givenname: Yaqin surname: Song fullname: Song, Yaqin organization: State Key Laboratory of Strength and Vibration for Mechanical Structures, School of Aerospace, Xi’an Jiaotong University, , P.R. China – sequence: 2 givenname: Xiaogang surname: Yang fullname: Yang, Xiaogang organization: State Key Laboratory of Strength and Vibration for Mechanical Structures, School of Aerospace, Xi’an Jiaotong University, , P.R. China – sequence: 3 givenname: Tianbao surname: Dong fullname: Dong, Tianbao organization: Energetic Materials Measurement and Evaluation Center of CAEP, , P.R. China |
BookMark | eNotkE9LAzEQxYNUsK1e_AQL3oTVTGb_JMdSalUKHlTwtmSz2XbLNlmTbKHf3mg9zbyZx7zhNyMTY40m5BboAzLEx9fFKoUSqMALMgVe5innlE5ijxzTPIPiisy831MKnAmckq_3MDanxJpk2Nlgw067g-yTY1c7Gbo4dtoP1nid2DbZ2r5JlI0Ls028PnTKmmZUfzIKZ5U0oev1UTt_TS5b2Xt981_n5PNp9bF8Tjdv65flYpMqBjyktcxVnTGpRCEayHQrGSjIoNZ1Bm3BhOINaiwKUJxyWWYIqhQFw1aLUnCKc3J3vjs4-z1qH6q9HZ2JkRUDkSOWyFh03Z9d8UnvnW6rwXUH6U4V0OqXXBXJVWdy-APRiWNx |
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ContentType | Journal Article |
Copyright | Copyright IOS Press BV 2019 |
Copyright_xml | – notice: Copyright IOS Press BV 2019 |
DBID | AAYXX CITATION 7SP 7TB 8FD FR3 KR7 L7M |
DOI | 10.3233/JAE-171093 |
DatabaseName | CrossRef Electronics & Communications Abstracts Mechanical & Transportation Engineering Abstracts Technology Research Database Engineering Research Database Civil Engineering Abstracts Advanced Technologies Database with Aerospace |
DatabaseTitle | CrossRef Civil Engineering Abstracts Engineering Research Database Technology Research Database Mechanical & Transportation Engineering Abstracts Advanced Technologies Database with Aerospace Electronics & Communications Abstracts |
DatabaseTitleList | Civil Engineering Abstracts |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Physics |
EISSN | 1875-8800 |
EndPage | 397 |
ExternalDocumentID | 10_3233_JAE_171093 |
GroupedDBID | 0R~ 4.4 5GY AAYXX ABDBF ABJNI ACGFO ACGFS ACIWK ACPQW ADZMO AENEX AFRHK AIAGR ALMA_UNASSIGNED_HOLDINGS ASPBG AVWKF CITATION DU5 EAD EAP EAS EBS ECV EJD EMK EPL EST ESX HZ~ I-F IOS MET MIO MK~ ML~ MV1 NGNOM O9- TUS 7SP 7TB 8FD FR3 KR7 L7M |
ID | FETCH-LOGICAL-c218t-ba5cb42ac969d14efa21c141beb41f629c8d3e3661c808a7431c79623fe979803 |
ISSN | 1383-5416 |
IngestDate | Fri Sep 13 06:01:56 EDT 2024 Fri Aug 23 03:36:00 EDT 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 2 |
Language | English |
LinkModel | OpenURL |
MergedId | FETCHMERGED-LOGICAL-c218t-ba5cb42ac969d14efa21c141beb41f629c8d3e3661c808a7431c79623fe979803 |
PQID | 2195337322 |
PQPubID | 2046404 |
PageCount | 7 |
ParticipantIDs | proquest_journals_2195337322 crossref_primary_10_3233_JAE_171093 |
PublicationCentury | 2000 |
PublicationDate | 2019-01-01 |
PublicationDateYYYYMMDD | 2019-01-01 |
PublicationDate_xml | – month: 01 year: 2019 text: 2019-01-01 day: 01 |
PublicationDecade | 2010 |
PublicationPlace | Amsterdam |
PublicationPlace_xml | – name: Amsterdam |
PublicationTitle | International journal of applied electromagnetics and mechanics |
PublicationYear | 2019 |
Publisher | IOS Press BV |
Publisher_xml | – name: IOS Press BV |
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SSID | ssj0018293 |
Score | 2.1628625 |
Snippet | The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with... |
SourceID | proquest crossref |
SourceType | Aggregation Database |
StartPage | 391 |
SubjectTerms | Elastic waves Frequency spectrum Gold Gold coatings Laser beams Resonant frequencies Vibration Vibration analysis Vibration measurement Vibration response Wave dispersion Wave equations |
Title | Study on photothermal vibration response of gold coating semiconducting microcantilevers |
URI | https://www.proquest.com/docview/2195337322/abstract/ |
Volume | 59 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb9QwELagFRIXxFOUFmQJbiiwjp2Hj1vYValKe9islJ4i27GXldik7YYe-PWMYyebVAgBlyhxIiua-TSeGc98RugdZ1ymrBSgATUJmA5NkJrSBJa6KiZxKom0vcNfz-OTJTvNo3yXzGm7Sxr5Qf38bV_J_2gVxkCvtkv2HzTbTwoDcA_6hStoGK5_peOFY4Su3l99q5u2lWoDEr-1EXCr1htXANumBVb1d9vAJtoy560tia8ry_VqHze2Ks_KGEzErS-J7zzWccpwQDQhvP_qD9LZiFWle87njbYdxYNK-oUv_b0U1-sej5c-WZ2vRb0Sfg21XrX_OAPsSlEPMxO2GWqUmfhysXB1JF2ezFlYCImDiBHPf-3GIGgKwJBMhmbZE4WvB9Gxs7HUHe911_bT0Oam56fTWUBsgSndrXDdrv75RTFfnp0V2SzP7qP9MOERxOv70-PPx_N-6ykNW6bm_j8dp62d_eNu7rEXM17EW88ke4we-ZACTx0-nqB7unqKHrSlvWr7DOUtSnBd4SFKcI8S3KEE1wZblGCPEjxGCb6LkudoOZ9ln04Cf55GoMCRawIpIiVZKBSPeUmYNiIkijAitWTExCFXaUk1BY9NpZNUWN9SJRz8Y6N5wtMJfYH2qrrSLxHmOqJhqWJTTjQj8D1PTExEGYURNTSKD9DbTj7FlaNNKSDctFIsQIqFk-IBOupEV3j8bovQbuzSBBaaV39-fYge7lB3hPaamx_6NXiIjXzjdfoLjGZtpQ |
link.rule.ids | 315,786,790,27957,27958 |
linkProvider | EBSCOhost |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Study+on+photothermal+vibration+response+of+gold+coating+semiconducting+microcantilevers&rft.jtitle=International+journal+of+applied+electromagnetics+and+mechanics&rft.au=Song%2C+Yaqin&rft.au=Yang%2C+Xiaogang&rft.au=Dong%2C+Tianbao&rft.date=2019-01-01&rft.pub=IOS+Press+BV&rft.issn=1383-5416&rft.eissn=1875-8800&rft.volume=59&rft.issue=2&rft.spage=391&rft_id=info:doi/10.3233%2FJAE-171093&rft.externalDBID=NO_FULL_TEXT |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1383-5416&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1383-5416&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1383-5416&client=summon |