Study on photothermal vibration response of gold coating semiconducting microcantilevers

The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and an...

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Bibliographic Details
Published inInternational journal of applied electromagnetics and mechanics Vol. 59; no. 2; pp. 391 - 397
Main Authors Song, Yaqin, Yang, Xiaogang, Dong, Tianbao
Format Journal Article
LanguageEnglish
Published Amsterdam IOS Press BV 01.01.2019
Subjects
Elastic waves
Frequency spectrum
Gold
Gold coatings
Laser beams
Resonant frequencies
Vibration
Vibration analysis
Vibration measurement
Vibration response
Wave dispersion
Wave equations
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Summary:The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and analyzed for a set of microcantilevers with different coating thickness at the region near the first resonant frequency. Also the vibrations of microcantilevers were calculated using coupled carrier dispersion, thermal wave and elastic wave equations. The results showed that the experimental results had a good agreement with the theoretical ones.
ISSN:1383-5416
1875-8800
DOI:10.3233/JAE-171093