Frequency fluctuations in silicon nanoresonators
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Published in | Nature nanotechnology Vol. 11; no. 6; pp. 552 - 558 |
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Main Authors | , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
29.02.2016
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Online Access | Get full text |
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ISSN: | 1748-3387 1748-3395 |
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DOI: | 10.1038/nnano.2016.19 |