Plasma parameters and volume kinetics in Cl2/O2 mixtures

• Published in: Journal of materials science. Materials in electronics Vol. 16; no. 6; pp. 315 - 321
• Main Authors: Efremov, A., Kwon, K.-H., Park, C.-S., Choi, S.-I., Kim, C. I., Chai, S.-H.
• Format: Journal Article
• Language: English
• Published: New York Springer Nature B.V 01.06.2005
• Subjects: Charged particles; Plasma; Studies
• ISSN: 0957-4522; 1573-482X
• DOI: 10.1007/s10854-005-1141-y

We investigated plasma characteristics, plasma mass content and kinetic dependencies of both neutral and charged particle formation and decay in Cl^sub 2^/O^sub 2^ gas mixture. For these purposes we used a combination of experimental methods (optical emission spectroscopy, Langmuir probe) and a plasma modeling on the base of self-consistent solution of Boltzmann kinetic equation together with balance kinetic equations for neutral and charged particles in a quasi-stationary approximation. It was found that the change of O^sub 2^/(Cl^sub 2^+O^sub 2^) mixing ratio from 0 to 0.2 leads to an increase of electron average energy and electron energy distribution function (EEDF) deformation. The main mechanisms of Cl and O atom formation are the direct electron impact dissociation of corresponding molecules while the contribution of all possible "secondary" processes is not significant in the case of a relatively low O^sub 2^ addition.[PUBLICATION ABSTRACT]