Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films

The mass sensitivity of an AlN thin film resonators operated in air at 6-8GHz has been investigated in theory and experiment. The 30x30D*mm wide resonators included a 180-300nm thick, highly oriented AlN thin film, bottom and top electrode, and an acoustic reflector made of AlN/SiO2 multilayers. The...

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Published inSensors and actuators. B, Chemical Vol. 114; no. 2; pp. 681 - 686
Main Authors Rey-Mermet, S, Lanz, R, Muralt, P
Format Journal Article
LanguageEnglish
Published 26.04.2006
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Summary:The mass sensitivity of an AlN thin film resonators operated in air at 6-8GHz has been investigated in theory and experiment. The 30x30D*mm wide resonators included a 180-300nm thick, highly oriented AlN thin film, bottom and top electrode, and an acoustic reflector made of AlN/SiO2 multilayers. The top electrode was loaded by defined polymer layers to test sensitivity and simulation model. The impact of type and thickness of the top electrode was simulated. Ten to twenty nanometers thick PMMA coatings served to demonstrate sensitivity with a gettering gel in form of spontaneous adsorption of acetone from the vapour phase. Finally, a self-assembled monolayer of 11-mercaptoundecanoic acid was formed on a Pt top electrode for the demonstration of a sub-monolayer sensor in air. In both cases, pico-grams could be detected with a sensitivity up to 1000m2/kg.
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ISSN:0925-4005
DOI:10.1016/j.snb.2005.04.047