Zone melting recrystallization for dielectrically isolated bipolar transistors

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 139; no. 11; pp. 3288 - 3294
Main Author ARIMOTO, Y
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.11.1992
Subjects
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Microelectronic fabrication
Voltage current curve
Zone melting
Manufacturing process
Integrated circuit
Recrystallization
Leakage current
Electrical insulation
Wafer
Bipolar transistor
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More Information
ISSN:0013-4651
1945-7111
DOI:10.1149/1.2069069