Current transport through silicon oxynitride films
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| Published in | Journal of the Electrochemical Society Vol. 142; no. 8; pp. 2836 - 2838 |
|---|---|
| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Pennington, NJ
Electrochemical Society
01.08.1995
|
| Subjects | |
| Online Access | Get full text |
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| Author | O'CLOCK, G. D KHALIQ, M. A LIDKE, K. A |
|---|---|
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| Issue | 8 |
| Keywords | Thin films Oxynitrides Silicon compounds Fowler-Nordheim theory Inorganic compounds Temperature effects Electric field effects Poole-Frenkel effect Experimental study Electric conductivity |
| Language | English |
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| SubjectTerms | Condensed matter: electronic structure, electrical, magnetic, and optical properties Electrical properties of specific thin films Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Other inorganic semiconductors Physics |
| Title | Current transport through silicon oxynitride films |
| Volume | 142 |
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