Current transport through silicon oxynitride films

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 142; no. 8; pp. 2836 - 2838
Main Authors O'CLOCK, G. D, KHALIQ, M. A, LIDKE, K. A
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.08.1995
Subjects
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electrical properties of specific thin films
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Other inorganic semiconductors
Physics
Thin films
Oxynitrides
Silicon compounds
Fowler-Nordheim theory
Inorganic compounds
Temperature effects
Electric field effects
Poole-Frenkel effect
Experimental study
Electric conductivity
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2050101