Evaluation of subsurface damage in GaAs substrates by X-ray diffraction and optical techniques
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Published in | Journal of the Electrochemical Society Vol. 137; no. 10; pp. 3272 - 3274 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
01.10.1990
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Subjects | |
Online Access | Get full text |
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ISSN: | 0013-4651 1945-7111 |
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DOI: | 10.1149/1.2086198 |