Characterisation of 60° misfit dislocations in SiGe alloy using nuclear microscopy
This paper uses the transmission ion channeling technique on the NUS Singletron accelerator to map misfit dislocations at the interface of a SiGe layer epitaxially grown on a (001) silicon substrate. A bunch of five 60° dislocations and a single dislocation have been studied using a focused 2MeV pro...
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| Published in | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 231; no. 1-4; pp. 452 - 456 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
01.04.2005
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| Subjects | |
| Online Access | Get full text |
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| Abstract | This paper uses the transmission ion channeling technique on the NUS Singletron accelerator to map misfit dislocations at the interface of a SiGe layer epitaxially grown on a (001) silicon substrate. A bunch of five 60° dislocations and a single dislocation have been studied using a focused 2MeV proton beam with a spatial resolution of 60nm and good image statistics. The bent (110) planes due to 60° dislocations cause the image contrast to change asymmetrically while tilting the sample close to the channeling direction. |
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| AbstractList | This paper uses the transmission ion channeling technique on the NUS Singletron accelerator to map misfit dislocations at the interface of a SiGe layer epitaxially grown on a (001) silicon substrate. A bunch of five 60° dislocations and a single dislocation have been studied using a focused 2MeV proton beam with a spatial resolution of 60nm and good image statistics. The bent (110) planes due to 60° dislocations cause the image contrast to change asymmetrically while tilting the sample close to the channeling direction. |
| Author | Teo, E.J. Breese, M.B.H. Huang, L. |
| Author_xml | – sequence: 1 givenname: L. surname: Huang fullname: Huang, L. email: scip1308@nus.edu.sg – sequence: 2 givenname: M.B.H. surname: Breese fullname: Breese, M.B.H. – sequence: 3 givenname: E.J. surname: Teo fullname: Teo, E.J. |
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| CitedBy_id | crossref_primary_10_1016_j_prostr_2022_12_109 |
| Cites_doi | 10.1016/0168-583X(95)00449-1 10.1103/PhysRevLett.92.045503 10.1016/S0168-583X(03)01003-6 10.1016/0168-583X(91)95030-H |
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| Keywords | 07.78.+s Misfit dislocation Transmission ion channeling 61.80.Li 61.85.+p |
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| References | Breese, Teo, Rana (bib5) 2004; 92 P.J.C. King, The crystal defect imaging using transmission ion channelling, Department of Materials, University of Oxford, Worcester College, 1993 Cholewa, Bench, Saint, Legge, Wielunski (bib1) 1991; 56–57 M.B.H. Breese, D.N. Jamieson, P.J.C. King, Materials Analysis Using a Nuclear Microprobe, 1996 Watt, van Kan, Rajta, Bettiol, Choo, Breese, Osipowicz (bib4) 2003; 210 King, Breese, Wilshaw, Grime (bib2) 1995; 104 Breese (10.1016/j.nimb.2005.01.099_bib5) 2004; 92 10.1016/j.nimb.2005.01.099_bib3 Cholewa (10.1016/j.nimb.2005.01.099_bib1) 1991; 56–57 Watt (10.1016/j.nimb.2005.01.099_bib4) 2003; 210 10.1016/j.nimb.2005.01.099_bib6 King (10.1016/j.nimb.2005.01.099_bib2) 1995; 104 |
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| SubjectTerms | Misfit dislocation Transmission ion channeling |
| Title | Characterisation of 60° misfit dislocations in SiGe alloy using nuclear microscopy |
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