High Performance Poly-Si Thin Film Transistors Fabricated by a Simple Crystallization Method Using Ni-Silicide Seeds
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Published in | Journal of the Electrochemical Society Vol. 158; no. 11; p. J354 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
2011
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Online Access | Get full text |
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ISSN: | 0013-4651 |
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DOI: | 10.1149/2.049111jes |