Fabrication of submillimeter-radius optical waveguide bends with anisotropic and isotropic wet chemical etchants

Wet chemical etchants suitable for making GaAs/AlGaAs single-mode optical waveguide bends with radii as low as 300 mu m for excess bend losses of 1 dB/90 degrees and propagation losses as low as 1 dB/cm at lambda =1.5 mu m are described. Additional bend losses due to modal mismatch resulting from et...

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Bibliographic Details
Published inJournal of lightwave technology Vol. 8; no. 2; pp. 264 - 270
Main Authors Seto, M., Deri, R.J., Yi-Yan, A., Colas, E., Tomlinson, W.J., Bhat, R., Shahar, A.
Format Journal Article
LanguageEnglish
Published New York, NY IEEE 01.02.1990
Institute of Electrical and Electronics Engineers
Subjects
Anisotropic magnetoresistance
Applied sciences
Chemicals
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Gallium arsenide
Geometrical optics
Integrated optics. Optical fibers and wave guides
Optical and optoelectronic circuits
Optical device fabrication
Optical losses
Optical waveguides
Performance loss
Propagation losses
Wet etching
Gallium Arsenides
Single mode waveguide
Submillimetric wave
Aluminium Gallium Arsenides Mixed
Optical waveguide
Manufacturing
Chemical etching
Bent waveguide
III-V compound
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Summary:Wet chemical etchants suitable for making GaAs/AlGaAs single-mode optical waveguide bends with radii as low as 300 mu m for excess bend losses of 1 dB/90 degrees and propagation losses as low as 1 dB/cm at lambda =1.5 mu m are described. Additional bend losses due to modal mismatch resulting from etchant anisotropy are investigated, and it is shown that in many cases such anisotropy does not limit bend performance.< >
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0733-8724
1558-2213
DOI:10.1109/50.47881