Structural and optical properties of a-Si1-xCx:H films synthesized by dc magnetron sputtering technique
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Published in | Applied surface science Vol. 256; no. 14; pp. 4591 - 4595 |
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Main Authors | , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier
01.05.2010
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Subjects | |
Online Access | Get full text |
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ISSN: | 0169-4332 1873-5584 |
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DOI: | 10.1016/j.apsusc.2010.02.054 |