Microwave plasma enhanced chemical vapor deposition diamond synthesis from high carbon content source

• Published in: Materials research innovations Vol. 5; no. 3-4; pp. 135 - 139
• Main Authors: Hung, Chi-Chao, Tang, Yun-Sen, Shih, Han-Chang
• Format: Journal Article
• Language: English
• Published: Heidelberg Taylor & Francis 01.02.2002; Berlin Springer
• Subjects: Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Cross-disciplinary physics: materials science; rheology; Diamond; Exact sciences and technology; Materials science; Methane Content; Methods of deposition of films and coatings; film growth and epitaxy; MPECVD; Physics; Raman Spectroscopy; Synthetic mineral; Diamonds; Operating mode; Crystal seeds; Crystal growth from vapors; Experimental study; Substrates; Thin films; CVD; Silver; Nonmetals; Crystal nucleation; PECVD; Copper; Microwave discharge; Melts
• ISSN: 1432-8917; 1433-075X
• DOI: 10.1007/s10019-002-8637-3

To synthesize diamond films by microwave plasma enhanced chemical vapor deposition (MPECVD), the methane concentration (CH 4 /H 2 ) plays a crucial role. It is well-known that there always exists a critical methane concentration (≤0.6%) only below which a good quality diamond film can be obtained. In this study, however, the phenomena of diamond synthesis resulting from high carbon concentration conditions were observed. The molten metals, e.g., Ag, Cu, were used as the deposition substrates on which crystalline diamonds can be achieved from a methane content of CH 4 /H 2 ≥6% or even from solid carbon sources. These results suggest that there may exist a low methane content boundary layer (<0.6%) in the proximity of molten metal surface on which suitable species, CH, CH + , H α a and H β are composed for the diamond nucleation and growth similar to the condition as in the conventional low methane contents. The molten metal inclines to dissolve other forms of carbonaceous materials other than diamond, and thus keeps a much higher steady supply of carbon atoms that enhances the quality as well as the growth rate of the forming diamonds.