Xenon Flash Lamp Annealing of Poly-Si Thin Films

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 153; no. 7; p. H147
Main Authors Terai, Fujio, Matunaka, Shigeki, Tauchi, Akihiko, Ichimura, Chikako, Nagatomo, Takao, Homma, Tetsuya
Format Journal Article
LanguageEnglish
Published 2006
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ISSN:0013-4651
DOI:10.1149/1.2200291