Optical and Electrical Characterizations of Nanoscale Robust 3C-SiC Membrane for UV Sensing Applications

This paper presents the fabrication and optical characterization of an ultrathin 3C-SiC membrane for UV light detection. SiC nanoscale film was grown on Si substrate and subsequently released to form a robust membrane with a high aspect ratio of about 5000. Transmission measurements were performed t...

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Bibliographic Details
Published inKey engineering materials Vol. 775; pp. 278 - 282
Main Authors Dinh, T., FOISAL, ABU RIDUAN, Dao, D.V., Streed, E.W., Iacopi, A., Hold, L.
Format Journal Article
LanguageEnglish
Published Zurich Trans Tech Publications Ltd 01.08.2018
Subjects
Electric contacts
High aspect ratio
Light
Optical properties
Photoelectric effect
Photoelectric emission
Silicon carbide
Silicon substrates
Thickness
Ultraviolet radiation
Thickness Calculation
Transmission Spectrum
3C-SiC Membrane
UV Photodetector
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Summary:This paper presents the fabrication and optical characterization of an ultrathin 3C-SiC membrane for UV light detection. SiC nanoscale film was grown on Si substrate and subsequently released to form a robust membrane with a high aspect ratio of about 5000. Transmission measurements were performed to determine the thickness of the film with a high accuracy of 98%. We also employed a simple and highly effective direct wirebonding technique to form electrical contacts to the SiC membrane. The considerable change in the photocurrent of the SiC membrane was observed under UV illumination, indicating the potential of using 3C-SiC membranes for UV detection.
Bibliography:Selected, peer reviewed papers from the 8th International Conference on Key Engineering Materials (8th ICKEM 2018), March 16-18, 2018, Osaka, Japan
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.775.278