Chemical Vapor Deposition of AlZrN Coatings by the Reaction of In Situ Produced ZrCl4 and AlCl3 with NH3

Ternary transition metal nitrides are commonly used as protective coatings on cutting tools, owing to their excellent mechanical and wear properties. While AlTiN is a very well-studied material, little is known about AlZrN, in part due to the large miscibility gap in the phase diagram of AlN-ZrN. In...

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Bibliographic Details
Published inKey engineering materials Vol. 809; pp. 427 - 432
Main Authors Rauchenwald, Elisabeth, Lessiak, Mario, Haubner, Roland, Weissenbacher, Ronald
Format Journal Article
LanguageEnglish
Published Zurich Trans Tech Publications Ltd 01.06.2019
Subjects
Aluminum chloride
Ammonia
Carrier gases
Chemical vapor deposition
Cutting wear
Energy dispersive X ray spectroscopy
Energy transmission
High temperature
Metal nitrides
Microscopy
Miscibility
Morphology
Organic chemistry
Phase diagrams
Protective coatings
Scanning electron microscopy
Thin films
Transition metals
Transmission electron microscopy
Zirconium
CVD
Hard Coating
TEM
AlZrN
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Summary:Ternary transition metal nitrides are commonly used as protective coatings on cutting tools, owing to their excellent mechanical and wear properties. While AlTiN is a very well-studied material, little is known about AlZrN, in part due to the large miscibility gap in the phase diagram of AlN-ZrN. In this study, AlZrN thin films were prepared using chemical vapor deposition. By the reaction of metallic aluminum and zirconium with HCl gas under elevated temperature, AlCl3 and ZrCl4 were produced in situ and subsequently transported into a heated coating reactor with a carrier gas. Due to the high temperatures and the separately introduced mixture of NH3 and N2, AlZrN coatings were deposited. By varying the experimental conditions, such as the ratio between ZrCl4 and AlCl3, we studied the influence of these parameters on the coating thickness and morphology as well as the microstructure. Additionally, the impact of different sample positions in the coating reactor on the deposited coatings was investigated. Furthermore, the generated samples were characterized by scanning electron microscopy, energy dispersive x-ray spectroscopy and transmission electron microscopy.
Bibliography:Selected, peer reviewed papers from the “22nd Symposium on Composites”, June 26-28, 2019, Kaiserslautern, Germany
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.809.427