High-performance optical waveguide devices using 300mm Si photonics platform

• Published in: Microelectronic engineering Vol. 156; pp. 55 - 58
• Main Authors: Mogami, Tohru, Horikawa, Tsuyoshi, Kinoshita, Keizo, Sasaki, Hironori, Morito, Ken, Kurata, Kazuhiko
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.04.2016
• Subjects: Propagation loss; Silicon interposer; Silicon photonics; Waveguide; Silicon photonics; Silicon interposer; Propagation loss; Waveguide
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2015.10.019

The Si photonics platform for 300mm SOI wafers has been built up for optical multi-applications. The performance of main optical waveguide devices has been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5dB/cm at 1.55μm wavelength for 220nm-thick single-mode waveguides with TE-polarization. MMI coupler, AWG and WDM filter showed superior performance for their applications. The 50×50mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications. [Display omitted] •The Si photonics platform for 300mm SOI wafers has been built up.•The propagation loss is less than 0.5dB/cm at 1.55μm wavelength for waveguides.•The 50×50mm2 large Si interposers have been demonstrated.•This platform is useful for performance enhancement on the optical integrated circuit