Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometer
This paper reports the design, simulation and fabrication of a MEMS fluidic inertial sensor, which integrates three-axis gyroscope and dual-axis accelerometer so that the device can independently detect three components of angular rate and two components of linear acceleration. The gyroscope utilize...
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Published in | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 1170 - 1173 |
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Main Authors | , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.06.2009
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Subjects | |
Online Access | Get full text |
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Summary: | This paper reports the design, simulation and fabrication of a MEMS fluidic inertial sensor, which integrates three-axis gyroscope and dual-axis accelerometer so that the device can independently detect three components of angular rate and two components of linear acceleration. The gyroscope utilizes jet flow directly created from an integrated micro pump. This simplifies packaging process while maintaining good characteristics of the device. The device was fabricated by standard bulk MEMS technology. Fundamental experiments have been done, the performance of the micro jet-pump was evaluated and the sensitivity of accelerometer was characterized. |
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ISBN: | 1424441900 9781424441907 |
ISSN: | 2159-547X |
DOI: | 10.1109/SENSOR.2009.5285911 |