Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometer

This paper reports the design, simulation and fabrication of a MEMS fluidic inertial sensor, which integrates three-axis gyroscope and dual-axis accelerometer so that the device can independently detect three components of angular rate and two components of linear acceleration. The gyroscope utilize...

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Bibliographic Details
Published inTRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference pp. 1170 - 1173
Main Authors Dau, V.T., Otake, T., Dinh, T.X., Sugiyama, S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2009
Subjects
2DOF accelerometer
3DOF gyroscope
Acceleration
Accelerometers
Convective inertial sensor
Fabrication
Gas detectors
Gyroscopes
hotwire
Mechanical sensors
Micromechanical devices
Pumps
Sensor phenomena and characterization
Silicon
transient simulation
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Summary:This paper reports the design, simulation and fabrication of a MEMS fluidic inertial sensor, which integrates three-axis gyroscope and dual-axis accelerometer so that the device can independently detect three components of angular rate and two components of linear acceleration. The gyroscope utilizes jet flow directly created from an integrated micro pump. This simplifies packaging process while maintaining good characteristics of the device. The device was fabricated by standard bulk MEMS technology. Fundamental experiments have been done, the performance of the micro jet-pump was evaluated and the sensitivity of accelerometer was characterized.
ISBN:1424441900
9781424441907
ISSN:2159-547X
DOI:10.1109/SENSOR.2009.5285911