Wet etching of (0001) GaN/Al2O3 grown by MOVPE
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Published in | Journal of electronic materials Vol. 27; no. 5; pp. L32 - L34 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
New York, NY
Institute of Electrical and Electronics Engineers
01.05.1998
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Subjects | |
Online Access | Get full text |
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ISSN: | 0361-5235 1543-186X |
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DOI: | 10.1007/s11664-998-0184-2 |