Static response of MEMS double layered simply supported beams containing quasicrystals

Abstract The static response of Micro-electromechanical system (MEMS) double-layer simply-supported beams made of quasicrystalline (QC) and crystal (C) is studied considering the influence of nonlocal scale effects. In light of the theory of nonlocal elasticity for QCs, the closed responses of phono...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 2808; no. 1; pp. 12056 - 12061
Main Authors Huang, Yunzhi, Wang, Penghui, Liu, Yuepeng
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.07.2024
Subjects
Electric fields
Matrix methods
Microbeams
Microelectromechanical systems
Nonlocal elasticity
Phonons
Quasicrystals
State vectors
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Summary:Abstract The static response of Micro-electromechanical system (MEMS) double-layer simply-supported beams made of quasicrystalline (QC) and crystal (C) is studied considering the influence of nonlocal scale effects. In light of the theory of nonlocal elasticity for QCs, the closed responses of phonon, phason, and electric fields are derived using the state vector formula and propagator matrix method. Calculation results indicate that theoretical responses are consistent with the simulation ones via the finite element. Among the three micro-distributed forces, the magnitude of their effects is in order of electric field, Casimir, and van der Waals micro-forces. The rising van der Waals and Casimir micro-forces elevates the displacement with the stress of beams. The displacement decreases slowly when nonlocal scale parameters grow. The phonon displacement of microbeams with C/QC stacking order is larger than the corresponding value of QC/C stacking order. This paper’s results support the design and evaluation of MEMS structures containing QCs.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2808/1/012056