Thermal conductivity of DLC Films deposited from methane and acetylene by RF plasma enhanced CVD

The thermal conductivity of diamond-like carbon (DLC) films prepared by RF plasma enhanced CVD were investigated by 3ω method. With the results of Raman spectroscopy and Rutherford Back Scattering / Elastic Recoil Detection Analysis (RBS/ERDA), the influence of amorphousness and density on the therm...

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Bibliographic Details
Published inNetsu Bussei Vol. 21; no. 3; pp. 131 - 136
Main Authors Miyai, Seiichi, Kobayashi, Tomohiro, Terai, Takayuki
Format Journal Article
LanguageJapanese
English
Published JAPAN SOCIETY OF THERMOPHYSICAL PROPERTIES 01.01.2007
Subjects
3ω method
Acetylene
Density
Deposition
Diamond-like carbon films
DLC
Heat transfer
Methane
Plasma enhanced chemical vapor deposition
Raman spectroscopy
RBS/ERDA
Thermal conductivity
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Summary:The thermal conductivity of diamond-like carbon (DLC) films prepared by RF plasma enhanced CVD were investigated by 3ω method. With the results of Raman spectroscopy and Rutherford Back Scattering / Elastic Recoil Detection Analysis (RBS/ERDA), the influence of amorphousness and density on the thermal conductivity of DLC film was discussed. DLC films from methane showed no obvious dependence on density. On the other hand, depending on deposition condition, DLC films with low amorphousness from acetylene showed dependence on density, while DLC films with high amorphousness from acetylene did not show such dependence on density.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0913-946X
1881-414X
1881-414X
DOI:10.2963/jjtp.21.131