Structural investigation of nanovoids around the interface of micro-vias by spherical aberration corrected scanning transmission electron microscopy

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Bibliographic Details
Published inMicroelectronics and reliability Vol. 150; p. 115231
Main Authors Hsieh, M.C., Nishijima, M., Jogo, K., Zhang, Z., Okumuara, R., Yoshida, H., Chen, C., Suetake, A., Honma, H., Seto, H., Kitahara, Y., Kita, K., Suganuma, K.
Format Journal Article
LanguageEnglish
Published 01.11.2023
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ISSN:0026-2714
DOI:10.1016/j.microrel.2023.115231