Investigation of HfNx-based films by Rutherford backscattering spectrometry and X-ray reflectometry

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Bibliographic Details
Published inVacuum Vol. 82; no. 8; pp. 842 - 846
Main Authors Chen, ChangChun, Liu, Ping, Lu, ChunHua
Format Journal Article
LanguageEnglish
Published 14.04.2008
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2007.11.013