Hyperspectral X-Ray Imaging For Nanometrology

A position-sensitive spectrometer with subpixel spatial resolution on the basis of a CCD camera has been implemented. The spectrometer operation is based on the proposed algorithm for real-time analysis of frames with single photon-induced events. The factors affecting the energy resolution, formati...

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Bibliographic Details
Published inCrystallography reports Vol. 69; no. 4; pp. 609 - 619
Main Authors Safonov, A. I., Nikolaev, K. V., Yakunin, S. N.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.08.2024
Springer Nature B.V
Subjects
Algorithms
Apparatus
CCD cameras
Crystallography and Scattering Methods
Emission spectra
Energy resolution
Energy spectra
Hyperspectral imaging
Nanometrology
Physics
Physics and Astronomy
Pixels
Real time operation
Singular value decomposition
Spatial resolution
Standing waves
X ray fluorescence analysis
X ray imagery
X ray spectrometers
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Summary:A position-sensitive spectrometer with subpixel spatial resolution on the basis of a CCD camera has been implemented. The spectrometer operation is based on the proposed algorithm for real-time analysis of frames with single photon-induced events. The factors affecting the energy resolution, formation of artifacts in energy spectra, and count efficiency are analyzed. An algorithm for obtaining subpixel resolution with application of singular value decomposition is proposed. The algorithm operation has been tested on synthesized experimental data and in a live experiment with registration of the spatial and energy structure of X-ray fluorescence emission from a layered system. The application potential of hyperspectral imaging for the experimental method of X-ray standing waves in the geometry of normal incidence and grazing X-ray fluorescence emission is demonstrated.
ISSN:1063-7745
1562-689X
DOI:10.1134/S1063774524601400