Mapping of a Ni/SiN x /n-SiC structure using scanning internal photoemission microscopy

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 58; no. SB; p. SBBC02
Main Authors Shiojima, Kenji, Hashizume, Takanori, Sato, Masaru, Takeyama, Mayumi B.
Format Journal Article
LanguageEnglish
Published 01.04.2019
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ISSN:0021-4922
1347-4065
DOI:10.7567/1347-4065/aafd99