A novel wet-etching method using joint proton source in LiNbO/sub 3

• Published in: IEEE photonics technology letters Vol. 18; no. 4; pp. 568 - 570
• Main Authors: Ting, Tien-Lun, Chen, Liang-Yin, Wang, Way-Seen
• Format: Journal Article
• Language: English
• Published: New York IEEE 15.02.2006; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Adipic acid; Diffusion; Dry etching; Etching; Integrated optics; Lithium niobate; Optical mixing; Optical modulation; optical ridge waveguide; Optical scattering; Optical surface waves; Optical waveguides; Photonics; proton exchange (PE); Protons; Ridges; Scattering; Sputter etching; Waveguides; Wet etching
• ISSN: 1041-1135; 1941-0174
• DOI: 10.1109/LPT.2005.863998

By mixing benzoic and adipic acids as the source of proton exchange, wet etched ridge waveguides are fabricated in Z-cut LiNbO 3 . Under appropriate adipic-benzoic acid concentration ratios, the joint proton source can suppress the proton diffusion in the lateral directions, and thus, the sidewalls are much more vertical than the usual. The etched depths are also enhanced for more than 30%. And meanwhile, the fabricated ridge waveguides possess smooth surfaces and the scattering losses are lower than that of the conventionally produced samples