Passive and Active Spectroscopic Diagnostics of a Microwave Discharge Oxygen Plasma of Atmospheric Pressure

We investigate fundamental parameters of a microwave discharge oxygen plasma, which is freely expanding in atmospheric pressure. Electron temperature, electron density, gas temperature are measured by line intensity measurement. Density of atomic oxygen is measured by laser induced fluorescence spec...

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Published inJournal of the Spectroscopical Society of Japan Vol. 49; no. 2; pp. 72 - 82
Main Authors TANDAI, Tomoya, TERASHI, Takaaki, KANO, Katsuhiro, SUZUKI, Masaaki, AKATSUKA, Hiroshi
Format Journal Article
LanguageJapanese
English
Published The Spectroscopical Society of Japan 2000
Subjects
atmospheric pressure plasma
laser induced fluorescence spectroscopy
microwave discharge plasma
oxygen plasma
spectroscopic diagnostics
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Summary:We investigate fundamental parameters of a microwave discharge oxygen plasma, which is freely expanding in atmospheric pressure. Electron temperature, electron density, gas temperature are measured by line intensity measurement. Density of atomic oxygen is measured by laser induced fluorescence spectroscopy (LIFS). Experimental results show that the plasma is in a state of non-equilibrium in the plasma upstream region, and becomes close to the state of equilibrium as going downstream. There exists high concentration of atomic oxygen in the upstream region.
ISSN:0038-7002
1884-6785
DOI:10.5111/bunkou.49.72