Characterization of TiNxOy thin films on architectural glass by X-ray reflection and spectrophotometry

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Bibliographic Details
Published inThin solid films Vol. 248; no. 2; pp. 184 - 192
Main Authors POLATO, P, FRANZ, H, RUSTICHELLI, F, MONTECCHI, M, PIEGARI, A
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier Science 15.08.1994
Subjects
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Metals and metallic alloys
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
Characterization
Thin films
Oxynitrides
Titanium oxides
Cathode sputtering
Refractive index
Optical properties
Physical vapor deposition
Experimental study
Optical coatings
Photoelectron spectroscopy
Titanium nitrides
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(94)90009-4