Chemical bonds and microstructure in nearly stoichiometric PECVD aSixNyHz
Saved in:
Published in | Thin solid films Vol. 260; no. 2; pp. 174 - 180 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier Science
15.05.1995
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0040-6090 1879-2731 |
---|---|
DOI: | 10.1016/0040-6090(94)06476-8 |