The Nd:YAG dual-channel laser system with Q - modulation for direct interference lithography

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Bibliographic Details
Published inPhotonics letters of Poland Vol. 6; no. 1
Main Authors Marczak, Jan Andrzej, Rycyk, Antoni, Sarzynski, Antoni, Strzelec, Marek, Czyz, Krzysztof
Format Journal Article
LanguageEnglish
Published 01.01.2014
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ISSN:2080-2242
2080-2242
DOI:10.4302/plp.2014.1.16