Infrared Response in the 95 to 300K Temperature Range of Detectors Based on Oxygen-depleted Y-Ba-Cu-O Thin Films

In order to develop radiation thermal detectors, oxygen-depleted amorphous YBa2Cu3O7−δ (YBCO) thin films were grown at low temperature (< 150¡C) on SiO2/Si substrates by direct-current hollow cathode sputtering, which allows to envisage further integration of detectors on a readout electronics si...

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Bibliographic Details
Published inPhysics procedia Vol. 36; pp. 223 - 228
Main Authors Kreisler, Alain J., Jagtap, Vishal S., Dégardin, Annick F.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2012
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Summary:In order to develop radiation thermal detectors, oxygen-depleted amorphous YBa2Cu3O7−δ (YBCO) thin films were grown at low temperature (< 150¡C) on SiO2/Si substrates by direct-current hollow cathode sputtering, which allows to envisage further integration of detectors on a readout electronics silicon chip. Planar and metal/YBCO/metal tri-layer sensing structures were then processed. The near-infrared optical response showed evidence of a transition from bolometric to pyroelectric behavior on planar devices, but it was only pyroelectric for tri-layer devices. They exhibited response level and noise performance competitive with other room temperature infrared bolometers with the possibility to enhance this performance by cooling down to 95K.
ISSN:1875-3892
1875-3892
DOI:10.1016/j.phpro.2012.06.150