Infrared Response in the 95 to 300K Temperature Range of Detectors Based on Oxygen-depleted Y-Ba-Cu-O Thin Films
In order to develop radiation thermal detectors, oxygen-depleted amorphous YBa2Cu3O7−δ (YBCO) thin films were grown at low temperature (< 150¡C) on SiO2/Si substrates by direct-current hollow cathode sputtering, which allows to envisage further integration of detectors on a readout electronics si...
Saved in:
Published in | Physics procedia Vol. 36; pp. 223 - 228 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
2012
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | In order to develop radiation thermal detectors, oxygen-depleted amorphous YBa2Cu3O7−δ (YBCO) thin films were grown at low temperature (< 150¡C) on SiO2/Si substrates by direct-current hollow cathode sputtering, which allows to envisage further integration of detectors on a readout electronics silicon chip. Planar and metal/YBCO/metal tri-layer sensing structures were then processed. The near-infrared optical response showed evidence of a transition from bolometric to pyroelectric behavior on planar devices, but it was only pyroelectric for tri-layer devices. They exhibited response level and noise performance competitive with other room temperature infrared bolometers with the possibility to enhance this performance by cooling down to 95K. |
---|---|
ISSN: | 1875-3892 1875-3892 |
DOI: | 10.1016/j.phpro.2012.06.150 |