Nanoelectromechanical (NEM) Devices for Logic and Memory Applications

• Published in: Journal of semiconductor technology and science Vol. 22; no. 3; pp. 188 - 197
• Main Authors: Kwon, Hyug-Su, Choi, Woo-Young
• Format: Journal Article
• Language: English
• Published: 대한전자공학회 01.06.2022
• Subjects: 전기공학; nanoelectromechanical (NEM) memory switch; CMOS; field programmable gate array (FPGA); monolithic three-dimensional (M3D) integration

Recent research on NEM devices for logic and memory applications has been reviewed from the perspective of monolithic 3D (M3D) heterogeneous integration. In addition, the backgrounds of M3D CMOS-NEM reconfigurable logic (RL) circuits are described in detail. Moreover, 65-nm process based M3D CMOS-NE...