A novel fabrication of meso-porous silica film by sol-gol of TEOS

• Published in: Journal of Zhejiang University. A. Science Vol. 5; no. 4; pp. 422 - 427
• Main Author: 殷明志 姚熹 张良莹
• Format: Journal Article
• Language: English
• Published: China Springer Nature B.V 01.04.2004
• Subjects: Colloids; Fabrication; Gels; Glycerol; Heterostructures; Microscopy, Electron, Scanning; Nanotechnology; Particle Size; Silanes; Silica; Silicon dioxide; Silicon Dioxide - isolation & purification; TEOS; Tetraethoxysilane; Tetraethyl orthosilicate; Thermal conductivity; 二氧化硅薄膜; 四乙基原硅酸酯; 导热性; 溶胶-凝胶法
• ISSN: 1009-3095; 1673-565X; 1862-1775
• DOI: 10.1631/jzus.2004.0422

A homogeneous crack-free nano- or meso-porous silica films on silicon was fabricated by colloidal silica sol derived by hydrolyzing tetraethyl orthosilicate (TEOS) catalyzing with (C4H9)4N^+OH^- in water medium. The solution with ratio of H2O/TEOS≥15,R4N^+ and glycerol as templates,combining with the hydrolyzed intermediate,controlled the silica aggregating; the templated silica film with heterostructure was developed into homogeneous nano-porous then meso-porous silica films after being annealed from 750℃ to 850℃;the formation mechanism of the porous silica films was discussed;morphologies of the silica films were characterized. The refractive indexes of the porous silica films were 1.256-1.458,the thermal conductivity <0.7 W/m/K.The fabricating procedure and the sequence had not been reported before.