Best Paper Award and Changes to the Editorial Board
The editors chose "Lens Heating Induced Aberration Prediction via Nonlinear Kalman Filters," by Can Bikcora, Martiijn van Veelen, Siep Weiland, and Wim M. J. Coene, as the Best Paper for the Transactions published in 2012.
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| Published in | IEEE transactions on semiconductor manufacturing Vol. 26; no. 2; p. 177 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
IEEE
01.05.2013
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| Subjects | |
| Online Access | Get full text |
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| Summary: | The editors chose "Lens Heating Induced Aberration Prediction via Nonlinear Kalman Filters," by Can Bikcora, Martiijn van Veelen, Siep Weiland, and Wim M. J. Coene, as the Best Paper for the Transactions published in 2012. |
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| ISSN: | 0894-6507 1558-2345 |
| DOI: | 10.1109/TSM.2013.2259319 |