Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F 2 - lasers
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Published in | Quantum electronics (Woodbury, N.Y.) Vol. 39; no. 4; pp. 385 - 387 |
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Main Authors | , , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
30.04.2009
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Online Access | Get full text |
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ISSN: | 1063-7818 1468-4799 |
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DOI: | 10.1070/QE2009v039n04ABEH013909 |