The Structural-Phase State and Diffusion Process in Film Structures Based on Co and Ru

• Published in: Journal of Nano- and Electronic Physics Vol. 10; no. 6
• Main Authors: Cheshko, I V, Lohvynov, A M, Saltykova, A I, Protsenko, S I
• Format: Journal Article
• Language: English; Russian; Ukrainian
• Published: Sumy Ukraine Sumy State University, Journal of Nano - and Electronic Physics 01.01.2018
• Subjects: Annealing; Crystal structure; Crystallinity; Crystallites; Diffusion layers; Phase composition; Thermal diffusion; Thick films; Thickness; Thin films
• ISSN: 2077-6772; 2306-4277
• DOI: 10.21272/jnep.10(6).06016

Investigation results of crystalline structure, phase composition and diffusion processes in film systems based on Co and Ru in the thickness range 5÷60 nm before and after annealing to temperature 600 К are represented. It was shown that the film system Co / Ru / S and Co / Ru / Со / S consist of a phase hcp-Co and hcp-Ru. Film systems consisting of Ru layers before and after annealing have a nanodispersed crystalline texture. The average size of crystallites samples before annealing does not exceed 3÷5 nm, after annealing the maximum average size was 16 nm for samples with layer thicknesses 60 nm. The results of the study of the diffusion process of two-layer film systems Co / Ru / in different thickness ranges showed that before and after annealing the relative individuality of separate layers is preserved since the calculated values of thermal diffusion effective coefficients for relatively thin and thick films lie in the range from 0.1 to 1.1 × 10 – 19 m2 / sec.