Accurate displacement-measuring interferometer with wide range using an I 2 frequency-stabilized laser diode based on sinusoidal frequency modulation

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Bibliographic Details
Published inMeasurement science & technology Vol. 27; no. 10; p. 105201
Main Authors Vu, Thanh-Tung, Higuchi, Masato, Aketagawa, Masato
Format Journal Article
LanguageEnglish
Published 01.10.2016
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ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/27/10/105201