Properites of hydrogenated amorphous silicon carbide films irradiated by excimer pulse laser

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Bibliographic Details
Published inActa Physica Sinica (Overseas Edition) Vol. 7; no. 12; pp. 930 - 935
Main Authors Li, Wang, Tian-fu, Ma, Xin-fan, Huang, Jun, Xu, Qi-liang, Li, Zhuang-chun, Wu, Kun-ji, Chen
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.1998
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ISSN:1004-423X
DOI:10.1088/1004-423X/7/12/008