DUV laser-induced deposition of a-C:H from CH2I2 at room temperature
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Published in | Applied surface science Vol. 138-139; pp. 413 - 417 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.01.1999
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Online Access | Get full text |
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ISSN: | 0169-4332 |
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DOI: | 10.1016/S0169-4332(98)00434-6 |