Properties of Titanium Foils after E-Beam Irradiation with Doses up to 1 GGy

A study is performed of the properties of titanium foils after prolonged use in the electron guns of electron-beam excimer lasers. The tensile strength of these foils do not change upon irradiation with e-beam pulses (300 keV) with doses of up to 1 GGy. Raman light scattering detects peaks correspon...

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Published inBulletin of the Russian Academy of Sciences. Physics Vol. 87; no. 12; pp. 1890 - 1893
Main Authors Sergeev, P. B., Kovalets, N. P., Kozhina, E. P., Bedin, S. A.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.12.2023
Springer Nature B.V
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Summary:A study is performed of the properties of titanium foils after prolonged use in the electron guns of electron-beam excimer lasers. The tensile strength of these foils do not change upon irradiation with e-beam pulses (300 keV) with doses of up to 1 GGy. Raman light scattering detects peaks corresponding to TiO 2 , TiN, and TiF on the surfaces of Ti foils in contact with fluorine contained in the gas mixture upon electron beam irradiation.
ISSN:1062-8738
1934-9432
DOI:10.1134/S1062873823704130