Properties of Titanium Foils after E-Beam Irradiation with Doses up to 1 GGy
A study is performed of the properties of titanium foils after prolonged use in the electron guns of electron-beam excimer lasers. The tensile strength of these foils do not change upon irradiation with e-beam pulses (300 keV) with doses of up to 1 GGy. Raman light scattering detects peaks correspon...
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Published in | Bulletin of the Russian Academy of Sciences. Physics Vol. 87; no. 12; pp. 1890 - 1893 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.12.2023
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | A study is performed of the properties of titanium foils after prolonged use in the electron guns of electron-beam excimer lasers. The tensile strength of these foils do not change upon irradiation with e-beam pulses (300 keV) with doses of up to 1 GGy. Raman light scattering detects peaks corresponding to TiO
2
, TiN, and TiF on the surfaces of Ti foils in contact with fluorine contained in the gas mixture upon electron beam irradiation. |
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ISSN: | 1062-8738 1934-9432 |
DOI: | 10.1134/S1062873823704130 |