Electric dipole formation at high-k dielectric/SiO2 interface

The formation of an electric dipole at the high-k/SiO2 interface is quantitatively analyzed. The band lineups and physical origin of dipole formation at the high-k/SiO2 interface are explained by the dielectric contact induced gap states （DCIGS）. The charge neutrality level （CNL） of the DCIGS, which...

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Published in半导体学报：英文版 no. 3; pp. 150 - 152
Main Author 韩锴 王晓磊 杨红 王文武
Format Journal Article
LanguageEnglish
Published 01.03.2015
Subjects
SiO2
介电
定量分析
实验数据
电偶极子
电荷转移
界面物理
间隙状态
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Summary:The formation of an electric dipole at the high-k/SiO2 interface is quantitatively analyzed. The band lineups and physical origin of dipole formation at the high-k/SiO2 interface are explained by the dielectric contact induced gap states （DCIGS）. The charge neutrality level （CNL） of the DCIGS, which represents a distribution of high-k and SiO2 contact induced gap states, is utilized to study the dipole moment. The charge transfer due to different CNLs of high-k and SiO2 is considered as the dominant origin of dipole formation. The theoretically calculated dipole strengths ofhigh-k/SiO2 systems based on this model are in good agreement with the experimental data.
Bibliography:The formation of an electric dipole at the high-k/SiO2 interface is quantitatively analyzed. The band lineups and physical origin of dipole formation at the high-k/SiO2 interface are explained by the dielectric contact induced gap states （DCIGS）. The charge neutrality level （CNL） of the DCIGS, which represents a distribution of high-k and SiO2 contact induced gap states, is utilized to study the dipole moment. The charge transfer due to different CNLs of high-k and SiO2 is considered as the dominant origin of dipole formation. The theoretically calculated dipole strengths ofhigh-k/SiO2 systems based on this model are in good agreement with the experimental data.
high-k dielectric; band alignment; interface dipole
11-5781/TN
Han Kai,Wang Xiaolei, Yang Hong, Wang Wenwu
ISSN:1674-4926
DOI:10.1088/1674-4926/36/3/036004