Thermodynamic and experimental study of diamond deposition from a CH4H2 gas mixture

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Bibliographic Details
Published inThin solid films Vol. 212; no. 1-2; pp. 104 - 111
Main Authors Jeoung Woo Kim, Young-Joon Baik, Kwang Yong Eun, Yoon, Duk N.
Format Journal Article
LanguageEnglish
Published 15.05.1992
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ISSN:0040-6090
DOI:10.1016/0040-6090(92)90506-7