An XYZ parallel nanopositioning stage with hybrid damping

• Published in: Sensors and actuators. A. Physical. Vol. 377; p. 115688
• Main Authors: Chen, Zhong, Qiu, Yuliang, Zhong, Xineng, Zhang, Xianmin
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 16.10.2024
• Subjects: Graded local resonators; Hybrid damping; Parallel nanopositioning stage; Passive damping; Tracking control; Parallel nanopositioning stage; Graded local resonators; Passive damping; Tracking control; Hybrid damping
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2024.115688

It is well known that lightly damping linear dynamics of a piezo-hysteresis-compensated flexure-based stage severely limits its motion control bandwidth. To address it, a novel damped XYZ parallel flexure-based nanopositioning stage (3⊥(P⊥K∥K), P for prismatic, K for Cardan or Universal) with hybrid passive damping, which is composed of shearing–squeezing hinge damping and in-band damping by graded local resonators (GLRs), is presented. The dynamic modeling and optimization design are implemented based on the maximization of motion amplification ratio, first-order natural frequency, and inverse in-band H2 norm of frequency response function (FRF). The optimized GLR module has distributed dynamic characteristics. The approximate motion decoupling is verified by Jacobin matrix analysis and experiments. The static/scanning-frequency dynamic experiments and step/triangular trajectory tracking control with the low-order controllers for all-hinge damping and hybrid damping stages are implemented. The experimental results indicate the small crosstalks due to hybrid passive damping, as the static crosstalks in X-to-Z and Y-to-Z are 0.293% and 0.276%, respectively, and the dynamic crosstalks in X-to-Z and Y-to-Z are 0.922% and 0.910%, respectively. The capability of improving positioning precision and expanding control bandwidth by hybrid damping only with a low-order controller is also validated experimentally. [Display omitted] •A novel damped XYZ parallel nanopositioning stage for broadband control is proposed.•Damping is composed of shearing–squeezing hinge damping and in-band damping by GLRs.•The stage dynamics are analytically modeled and optimized for broadband control.•Axis-crosstalk suppression and tracking performance can be improved under damping.