Pt/Pb(Zr, Ti)O 3 /Pt capacitor with excellent fatigue properties prepared by sol–gel process applied to FeRAM
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Published in | Journal of physics. D, Applied physics Vol. 39; no. 12; pp. 2587 - 2591 |
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Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
21.06.2006
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Online Access | Get full text |
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ISSN: | 0022-3727 1361-6463 |
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DOI: | 10.1088/0022-3727/39/12/017 |