Design and Manufacture of a Microfluidic Cell To Be Used With a Spectroscopic Ellipsometer
Abstract In material testing and manufacturing processes, creating thin layers is a widely used method for structure development or for surface treatment purposes. Despite its widespread use, the physical background of the layer development process is currently under-researched. Its examination requ...
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| Published in | Acta materialia transylvanica Vol. 4; no. 1; pp. 28 - 31 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
01.04.2021
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| Online Access | Get full text |
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| Summary: | Abstract
In material testing and manufacturing processes, creating thin layers is a widely used method for structure development or for surface treatment purposes. Despite its widespread use, the physical background of the layer development process is currently under-researched. Its examination requires the development of procedures and tools that, in combination with the existing tools, can help to understand these processes. The development of microfluidic cells is a way to solve this problem. In this paper, a newly developed microfluidic cell is presented, which also offers a solution to several problems encountered when using previous designs. |
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| ISSN: | 2601-8799 2601-8799 |
| DOI: | 10.33924/amt-2021-01-05 |