SOI MOS Technology for Spin Qubits
We fabricated Si Quantum Dot (QD) devices using relatively minor adaptations of a standard SOI CMOS process flow. We demonstrated that the spin of confined charges could be controlled via a local electrical-field excitation, owing in the caseof electrons to a geometrically-enabled tuning of the vall...
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Published in | ECS transactions Vol. 93; no. 1; pp. 35 - 36 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
The Electrochemical Society, Inc
22.10.2019
Electrochemical Society, Inc |
Subjects | |
Online Access | Get full text |
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Summary: | We fabricated Si Quantum Dot (QD) devices using relatively minor adaptations of a standard SOI CMOS process flow. We demonstrated that the spin of confined charges could be controlled via a local electrical-field excitation, owing in the caseof electrons to a geometrically-enabled tuning of the valley splitting and inter-valley spin-orbit coupling. We discuss improvement paths such as extending the spin coherence time by using epi-layers of nuclear-spin-free 28Si (99.992%) as a device template, and developing novel 3D architectures compatible with topological quantum error correction schemes. |
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ISSN: | 1938-5862 1938-6737 1938-6737 1938-5862 |
DOI: | 10.1149/09301.0035ecst |