Characterization of nanostructured HfO2 films using RBS and PAC
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Published in | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 273; pp. 195 - 198 |
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Main Authors | , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
15.02.2012
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Online Access | Get full text |
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ISSN: | 0168-583X |
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DOI: | 10.1016/j.nimb.2011.07.074 |