A Simplified Numerical Study of the Kr/Cl 2 Plasma Chemistry in Dielectric Barrier Discharge

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Bibliographic Details
Published inPlasma science & technology Vol. 15; no. 4; pp. 343 - 349
Main Authors Bachir, N. Larbi Daho, Belasri, A.
Format Journal Article
LanguageEnglish
Published 01.04.2013
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ISSN:1009-0630
DOI:10.1088/1009-0630/15/4/07