A Simplified Numerical Study of the Kr/Cl 2 Plasma Chemistry in Dielectric Barrier Discharge
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Published in | Plasma science & technology Vol. 15; no. 4; pp. 343 - 349 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
01.04.2013
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Online Access | Get full text |
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ISSN: | 1009-0630 |
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DOI: | 10.1088/1009-0630/15/4/07 |